Sheet Resistance Of Aluminum Film

Filmetrics sheet resistance measurement tools marry the technology developed and perfected by kla for over 30 years with the bench top instrument technology developed over the last 20 years by the filmetrics team.

Sheet resistance of aluminum film.

Where is the sheet resistance. Aluminum is lighter than copper. Note that squares have no units. The filmetrics family of sheet resistance measurement instruments can measure conductive sheets and thin films.

Metal layers al mo au etc. The value of the strip measurement is 89 2 200 0 446. It s nonmagnetic properties allow it to keep working anywhere even in thunderstorms. The term sheet resistance should be familiar if you work with electronic thin films.

Inline sheet resistance measurement conductivity mapping of thin films on wafer thin film monitoring of. Kla technologies include both contact and non contact methods. Non contact sheet resistance measurement. Since r depends on r and t only process control requires that r and t are well controlled.

If the sheet resistivity of the thin film resistor is 50 ohms square we are looking at a 300 ohm resistor. The results showed that resistivity of the film decreases linearly with the film thickness in the range of the thickness studied in this work. Aluminum has a resistivity varying from 2 65 to 2 82 10 8 ω m. Combined with it s light weight and alloyed with some other metals to make it stronger aluminum is ideal for electrical cables.

For example a strip with 200 squares gave a reading of 89 2 w while the direct reading read 0 4 w or 0 5 w depending on the contact resistance of the ohmmeter leads. Transparent conductive oxides ito zno etc. Rs 4 53 x v i. Metal nanowires meshes.

It is a measure of the lateral resistance through a thin square of material i e. By the way what we call rf sheet resistance is often called surface resistance or surface impedance or other names in textbooks. Thickness of al thin films four probe set up. This page will show you how to calculate sheet resistance of a layer of metal versus frequency.

So you can measure length and width in microns centimeters mils etc and then determine the number of squares by dividing length by width. Sheet resistance also known as surface resistance or surface resistivity is a common electrical property used to characterise thin films of conducting and semiconducting materials. Aluminum thin films electrical resistivity ρ electrical conductivity σ sheet resistance r. If the spacing between the probe points is constant and the conducting film thickness is less than 40 of the spacing and the edges of the film are more than 4 times the spacing distance from the measurement point the average resistance of the film or the sheet resistance is given by.